SMC - Slit Valves
Slit Valves
1) For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
Features | For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
- Long service life: 3 million cycles (within standard temperature range)
- Low particle generation: Reduced by 1/5 or more (compared with the existing product)
- Easier maintenance Easy replacement of bellows Gate can be replaced from above. (Made to order)
- Safety measures A mechanical end lock mechanism has been adopted.
Specifications | For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
| Series | Operating environmental pressure (Pa) (abs) | Fluid | Opening window size (H x W) (mm) | Operating pressure (MPa) (G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 | Inert gas | 50 x 336 | 0.45 to 0.6 |
2) Slit Valve XGT
Features | Slit Valve XGT
This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
ดาวน์โหลดไฟล์ PDFSpecifications | Slit Valve XGT
| Series | Operating environmental pressure (Pa) (abs) | Fluid | Opening window size (H x W) (mm) | Operating pressure (MPa) (G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 |
0.45 to 0.6 |
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