Hiwin Air bearing stage - LMAP
Hiwin Air bearing stage - LMAP : Low profile, XY symmetric structure design, with high stiffness granite base magnetic preload designed to enhance stabillty
Air bearing stage - LMAP
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Features | Air bearing stage - LMAP
Hiwin Air bearing stage - LMAP : With excellent grometrical property; applies ironless linear motor, no cogging to parid setting time, that provides exellent smooth motion and positioning accuracy; strong beam desin uses high stiffness lightweight aluminum, reduces weight of moving unit; gantry dual-drive struture and use of two sets of optical linear encoder for feedback compensation, offers dynamic control and error mapping; for clean room, no lubrication for easy maintenance and provides high flexible cable management.
- Wafer inspection system
- Micromachining system
- Laser lithography
- Semiconductor inspection system
- Exposure system
Dimensions | Air bearing stage - LMAP
| Type | Stroke | Dimensions | ||
|---|---|---|---|---|
| A | B | C | ||
| AP250 | 250 x 250 | 1168 | 1030 | 1100 |
| AP450 | 450 x 450 | 1368 | 1230 | 1300 |
| AP650 | 650 x 650 | 1568 | 1430 | 1500 |
Specifications | Air bearing stage - LMAP
| Specifications | Unit | AP250 | AP450 | AP650 |
|---|---|---|---|---|
| Stroke | mm | 250 x 250 | 450 x 450 | 650 x 650 |
| Motor specification | - | Beam axis : LMCC8 Gantry axes : LMCB8 x 2 | ||
| Bus Voltage | V | Up to 325 VDC | ||
| Instant current | A(pk) | 6.0 | ||
| Feedback system | - | Optical Linear Encoder : Analog period 40µm glass scale | ||
| Resolution*1 | µm | 10 | ||
| Repeatability | µm | ±0.5 | ±0.5 | ±0.5 |
| Positioning accuracy*2 | µm | ±1.5 | ±1.5 | ±1.5 |
| Horizontal straightness*3 | µm | ±1.5 | ±2 | ±2.5 |
| Vertical straightness*3 | µm | ±1.5 | ±2 | ±2.5 |
| Orthogonality | arc-sec | ±2.5 | ±2.5 | ±3.5 |
| Pitch*3 | arc-sec | ±6 | ±8 | ±12 |
| Yaw*3 | arc-sec | ±1.5 | ±2 | ±2.5 |
| Roll*3 | arc-sec | TBD | ||
| Allowable load | kg | 30 | ||
| Max. speed*4*5 | m/s | 0.6 | 0.8 | 1 |
| Max.acceleration*5 | m/s2 | 4 | 4.5 | 5 |
| Working pressure*6 | N/m2 | 4x105 N/m2 ± 2x104 N/m2 | ||
| Moving unit mass*7 (Bridge) | kg | 30 | ||
| Moving unit mass*7 (Gantry) | kg | 75 | 85 | 95 |
| Moving unit material | - | Aluminum (hardened anodized) | ||
| Base | - | Granite | ||
Note :
- The maximum resolution is up to 4096 times, resolution accuracy is about 4 nm
- Absolute accuracy is after error mapping.
- Required specification is restricted by load, this specification is based on empty load
- Must comply with the resolution of encoder and number of mass transfer rate
- Based on the limitations of motor instantly force, only allow moving unit mass about 8kg (center load)
- It is recommended to link pressure switch on the emergency stop devices to protect air bearing from overloading
- Free of load
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