Hiwin Linear Planar Servo Motor - LMSP

Linear Planar Servo Motor - LMSP

Hiwin Linear Planar Servo Motor - LMSP : The planer motor LMSP has integrated distance measurement sensors and works with position control (closed loop).
XY table : Closed loop thanks to integrated distance measurement Air bearing free of wear NO externally measurable magnetic fields The position accuracy is stable because of low heat generation. Can be mounted upside down

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Code | Stage Linear Planar Servo Motor - LMSP

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Dimensions | Stage Linear Planar Servo Motor - LMSP

Dimensions		Unit	P1	P2	P3	P4	P5	P6
Stator dimensions	Ls x Ws	mm	350 x 330	450 x 450	600 x 450	600 x 600	1000 x 600	850 x 850
Max. Stroke (One forcer)	LMSPX1/LMSPZ1	mm	190 x 140	290 x 260	440 x 260	440 x 410	840 x 410	690 x 660
	LMSPX2	mm	-	270 x 125	420 x 125	420 x 275	820 x275	670 x 525
Stator height	Hs	mm	50	50	70	70	100	120
Mass of Stator	-	kg	27	26	52	66	120	250
Fixing Distance	As x Bs	mm	165 x 310	213 x 426	288 x 426	288 x 576	(318-324-318) x 280	400 x 400
No. of mounting holes	-	-	6	6	6	6	10	9

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Specifications | Stage Linear Planar Servo Motor - LMSP

LMSP	Symbol	Unit	LMSPX1	LMSPZ1	LMSPX2
Max.forcer	Tm	N	75	75	140
Resolution	Rs	mm	0.001	0.001	0.001
Repeatability (unidirectional)	Rp	mm	0.002	0.001	0.002
Accuracy (every 300mm)	Ac	mm	±0.015	±0.015	±0.015
Max. speed (no load)	V	m/s	0.9	0.9	0.8
Max. load	-	kg	12.2	12.2	24.3
Length	Lf	mm	154	154	175
Width	Wf	mm	184	184	320
Height	Hf	mm	28	28	30
Air pressure	Pa	kg/cm2	3-4	3-4	3-4
Air flow rate	Fa	l/min	6.4	6.4	11
Mass	Mf	kg	1.8	1.8	3.7
Fixing distance	Af x Bf	mm x mm	146 x 87.5	146 x 87.5	72 x 140

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Configuration | Stage Linear Planar Servo Motor - LMSP