Hiwin Gantry Structure Customization - ALB

Hiwin Gantry Structure Customization - ALB : Glass substrate exposure Application, white testing equipment, wafer defact detection equipment.

Stage Gantry Structure Customization - ALB

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Feature | Stage Gantry Structure Customization - ALB

• Using non-contact air bearing.
• Without main tenance.
• High positioning accuracy.
• Not easily influenced by environmental temperature.
• With high-precision and large-size vacuum chuck.
• Z direct jitter 100 nm.
• vertical strainghtness up to ±1 µm.
• Equipped with ironless motor.

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Dimensions | Stage Gantry Structure Customization - ALB

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Specifications | Stage Gantry Structure Customization - ALB

Stage type	LMAP-CC8CB8-250-250
Motor Type	Ironless motor
Stroke(mm)	X-axis :250, Y-axis : 250
Peak Force(N) / Continuous Force(N)	X-axis : 780/195, Y-axis : 580/145
Repeatability(µm)	±0.75 (with HIWIN solution)
Accuracy(µm)	±1.5 (after error mapping)
Max. Acceleration(m/s2)	2(with payload)
Max. Velocity(m/s)	0.25(with payload)
Vertical Straightness(µm)	±1
Horizontal Straightness(µm)	±2
Orthogonality(arc-sec)	±3
Payload(kg)	15
Stage orientation	Horizontal

Note : All specifications can be designed according to customer demand.