Hiwin Multi-axes Customization - MLA

Hiwin Multi-axes Customization - MLA : Wafer cutting, the glass substrate testing equipment, wafer bonding.

Stage Multi-axes Customization - MLA

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Feature | Stage Multi-axes Customization - MLA

• Integration of high-precision TMN torque motor.
• With excellent flatness (X-Yxtheta 0.01 mm).
• Water cooling design, reduce thermal deformation.
• XY Stage low center of gravity design.
• Can be equipment with iron less or ironcore motor.

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Dimensions | Stage Multi-axes Customization - MLA

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Specifications | Stage Multi-axes Customization - MLA

Stage type	LMX2C-F23F43-300-300+BS-5-170+TMN93EH
Motor Type	Ironcore (/Ironless) motor & HIWIN AC Servo motor
Stroke(mm)	X-axis : 362, Y-axis : 390
Peak Force(N)/Continuous Force(N)	X-axis : 2082/764, Y-axis : 5496/2252
Repeatability(µm)	±0.5(with HIWIN solution)
Accuracy(µm)	±1(after error mapping)
Max. Acceleration(m/s2)	10(with payload)
Max. Velocity(m/s)	1(with payload)
Payload(kg)	Z-axis : 50, A-axis : 30
Stage orientation	Horizontal
Torque Motor Type	TMN93EH
Peak Torque(NM)/Continuous Torque(Nm)	45/15
Max. Velocity(rpm)	300(220V)
Repeatability(arc-sec)	±2.5
Accuracy(arc-sec)	±25
Inertia of rotation parts(kgm2)	0.052

Note : All specifications can be designed according to customer demand.